
measurements. Upon every maintenance visit, one of the barometers should be
replaced with the recalibrated spare one. This way you can ensure that there is a
maximum in accuracy and precission for further calculations.
Measuring Principle
The PTB210 barometers incorporate the BAROCAP silicon capacitive absolute
pressure sensor developed by Vaisala [8] . The BAROCAP principle can be found in
2.13. The sensor features excellent hysteresis and repeatability characteristics and
has an outstanding temperature and long-term stability.
Figure 2.13: The BAROCAP Pressure Sensor
[Manuel - PTB210 Digital Series with Serial Output, 12/05]
The sensor consists of two layers of single crystal silicon having a layer of glass
between them. The thinner silicon layer creates an integrated vacuum reference
chamber and forms a pressure-sensitive silicon diaphragm. The thicker silicon layer
is the rigid base plate of the sensor and is clad with a glass dielectric. Thin film
metallization is deposited to form a capacitor electrode inside the vacuum reference
chamber. The other electrode is the pressure-sensitive silicon diaphragm. When
pressure changes, the silicon diaphram bends and changes the height of the vacuum
gap in the sensor. This changes the capacitance of the sensor which is measured
and converted into a pressure reading [18].
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