Vaisala PTB210 SERIES Manuel d'instructions Page 28

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In addition to the resistive method for temperature measurement, the capacitive
measurement principle is used as in the KPC 1/6-ME temperature and humidity
sensor. For this principle, the sensor element is built out of a capacitor. The
dielectric is a polymer which absorbs or releases water proportionally to the relative
environmental humidity, and thus changes the capacitance of the capacitor. This
change in capacitance can be measured by an electronic circuit. This allows the
relative air humidity to be determined.
The sensor element itself is just as important for the sensor as the directly integrated
evaluation circuitry. It is the standard technology for integrated circuit fabrication
and the temperature sensor and the humidity sensor form one single unit together.
Figure 2.17: CMOSens Chip
[http://www.sensirion.com/en/images/CAD_SHT11.gif,
20.10.08]
This sensor includes a temperature sensor that is used for exact temperature com-
pensation. CMOSens sensors also contain additional intelligence on the chip for
functional control of the sensor element, for low-power functions, and also for com-
plete linearization and temperature compensation.
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